For its MEMS bending actuators, the Fraunhofer IPMS uses the proprietary nano-e-drive (NED) principle, leveraging the high forces of electrostatic fields in nanometre-sized electrode gaps to allow for mechanical movements with displacements in the micrometre range. The chip surface as well as the complete component volume is used for sound generation. The resonance frequency and thus the detection range and spatial resolution can then be defined by the geometry of the NED bending actuators.
Possible fields of applications for ultrasound-based non-contact motion detection include uses in automation, safety and medical technology as well as the automotive and entertainment and household electronics industries. Fraunhofer IPMS will present a first functional demonstrator showing how ultrasound can support gesture recognition at the 2019 Sensor and Test Measurement Fair event in Nürnberg.
Fraunhofer IPMS - www.ipms.fraunhofer.de